2D transition metal chalcogenides (TMCs) have attracted tremendous interest from both the scientific and technological communities due to their variety of properties and superior tunability through layer number, composition, and interface engineering. Wafer-scale production of 2D TMCs is critical to the industrial applications of these materials. By chemical vapor deposition method, we focus on the growth mechanism and growth kinetics, synthesize high-quality wafer-scale 2D semiconductor film and related heterostructures.